Carrier system for silicon wafer

摘要

There is disclosed a carrier system for carrying a silicon wafer or a cassette accommodating the wafers to arbitrary positions by loading an arm with them. This carrier system is arranged such that: a screw shaft is perpendicularly provided in a rotationally drivable manner between an upper plate and a bottom plate which are vertically connected through a plurality of guide bars to each other; a movable plate is so disposed as to be vertically movable by the rotation of the screw shaft and is guided by the guide bars in a vertically slidable manner between the upper plate and the bottom plate; a cylindrical member is perpendicularly so provided on the movable plate as to be rotationally drivable and penetrate the upper plate and protrude upwards therefrom; a horizontal movement member is fixed to an upper end of the cylindrical member; a carriage provided with the rotary arm is disposed in a horizontally movable manner on the horizontal movement member; a driving wire spanned between pulleys axially supported within the horizontal movement member is secured to the carriage; and the rotary arm including a wafer arm and a cassette arm which are disposed in positions orthogonal to each other is pivotally so supported on the carriage as to vertically rotate through approximately 90 DEG . In this constitution, the carrier system suffices for taking the silicon wafers in and out of the cassette and carrying the cassette itself.