| 摘要 |
PURPOSE:To produce a quartz base optical waveguide film having high quality by constructing it with an oxide single crystal substrate having high melting point, and a thick film of quartz base glass sintered at high temp. on the substrate, wherein a core layer is included in the quartz glass thick film. CONSTITUTION:A completely transparent quartz base optical waveguide film having high quality is obtnd. by using an oxide single crystal plate having high melting point for a substrate of the optical waveguide film, and vitrifying a film of fine glass particles at high temp., for example, at >=1,400 deg.C, more pref. at >=1,500 deg.C. This quartz base optical waveguide film (for single mode) consists of a sapphire (Al2O3 single crystal) substrate 1 as a high melting oxide single crystal substrate, a quartz base glass buffer layer 2, and a quartz base glass core layer 3. By this constitution, a quartz base optical waveguide film of high quality is prepared without causing remarkable deformation nor fusion of the substrate. |
