| 摘要 |
PURPOSE:To permit formation of patterns of desired shapes consisting of colored layers having excellent adhesive to a substrate with good accuracy and yield by forming the colored layers mixed and deposited by evaporation with dyes and silane coupling agent. CONSTITUTION:A resist layer 2 laminated on the substrate 1 is exposed and developed through a photomask 3 having a desired pattern to obtain a resist pattern 2a for lifting off. A material mixed with the silane coupling agent at 1-50wt.% by the weight of the dye is deposited by evaporation thereon to form the dye layer 4. The resist layer 2a and the colored layer 4a are removed together by immersing the substrate into a soln. for removing the photoresist, by which the colored pattern consisting of the colored layer 4b having the desired shape is obtd. The colored pattern 4b having the excellent adhesiveness to the substrate 1 is thereby formed with the good accuracy without generating cracks, exfoliation, etc. |
