| 摘要 |
PURPOSE:To easily produce an optical waveguide element by hydrolyzing Si alkoxide or Si alkoxide together with >=one kind of metal alkoxide, giving form to obtd. hydrolyzed liquid after the liquid is gelled, and introducing gaseous ammonia to the surface of the gel in the sintering stage of the gel after drying the gel. CONSTITUTION:Si alkoxide such as Si(OC2H5)4, Si(OCH3)4, etc. or Si alkoxide together with >=one kind of metal alkoxide, is hydrolyzed to prepare hydrolyzed soln., which is then allowed to contact with a mold 3 having a shape of an optical waveguide element to cause gelation. The gel contains a large amt. of water and alcohol in the inside of the gel. By drying the gel, porous gel 4 is obtd. By sintering the porous gel and flowing gaseous ammonia when a transparent glass body 5 is formed, an Si3N4 layer 6 is formed by the reaction of SiO2 on the surface of the gel body with the gaseous ammonia. By removing by cutting off unnecessary parts finally, an optical waveguide element 9 is obtnd. easily. |
