| 摘要 |
PURPOSE:To obtain the title crystal having a uniform concn. distribution in the lengthwise direction and a uniform distribution of the impurities infiltrated from a crucible by generating a convection current of the melt obtained by heating the raw material in a vessel only in the vicinity of a solid-liq. interface through the specified opposed coils to grow the crystal. CONSTITUTION:The coils 11a and 11b to be magnetized so that the respective magnetic fields are eliminated by each other at the point intermediate to both coils are opposed with the solid-liq. interface 8 in the crucible 1 contg. the melt of the Czochralski method in between in a distance of 1/5-2 times the radius of the coil from each other. Desired magnetic fields are impressed on the coils 11a and 11b, convection currents 10.1 and 10.2 are generated at the melt part 3.1 adjacent to the solid-liq. interface 8 of the raw material melt, convection is controlled at the separated melt part 3.2, and a crystal 9 is pulled up through a seed crystal 4 at the tip of a rotary carrier 5 while rotating the carrier 5.
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