Mechanically moving magnetic field generator relative to cathode - using spirally grooved rotating baseplate to mechanically impose spiral path on base rotation of field generator

摘要

A magnetic field generator moves along a path near a cathode surface with an essentially base rotation to which a mechanical linear movement is added forming a spiral path. The spiral path is itself rotated counter to the direction of rotation of the magnetic field to cover the complete surface of the cathode plate. Appts. comprises a magnetic field generator, a cathode plate of an arc evaporator, rotatable slotted slide rail, gear driven base plate having spiral groove.