| 摘要 |
PURPOSE:To obtain the prescribed characteristics of a semiconductor wafer without wasting complete pellets by forming elements for check on unsafe pellets on the periphery of the wafer. CONSTITUTION:Elements 2' and 3' for check are each formed on unstable pellets 1 and 1' on the periphery part of a semiconductor wafer including 50 % or more of normal pellets 5 and the characteristics of the wafer are measured using these elements. The elements for check are usually provided on the parts of the normal pellets 5, but if the elements 2' and 3' for check are provided within the regions of the pellets 1 and 1' in such a way, such a fact that the originally good pellets 5 are wastefully wasted is not generated.
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