发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To scale down the cell size, and to reduce the occupying area of a storage element by forming a floating gate onto the same plane, surrounding a control gate in a floating gate type EEPROM semiconductor device. CONSTITUTION:A control gate 7 is shaped into a specified region in an insulating film 4 formed onto a semiconductor substrate 1, and a floating gate 5 is shaped onto the same plane, surrounding the gate 7, thus forming an EEPROM. According to the gate constitution, even when the area of a cell is reduced, the area of the floating gate is increased, thus scaling down the size of the cell, then diminishing the occupying area of a storage element.
申请公布号 JPS63248175(A) 申请公布日期 1988.10.14
申请号 JP19870083166 申请日期 1987.04.03
申请人 MITSUBISHI ELECTRIC CORP 发明人 OZAKI KOJI;ARIMA HIDEAKI;KOBAYASHI KIYOTERU;KINOSHITA YASUSHI;OMORI TOSHIAKI;TATEISHI JUNJI
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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