| 摘要 |
PURPOSE:To automatically correct the relative position relation between a sensor for detection and a body to be inspected by detecting the reflecting direction of reflected and refracted light from the body to be inspected and measuring the position shift of the body to be inspected. CONSTITUTION:A beam from a laser light source 1 is projected on the body 2 to be inspected through a light splitting means 12, its reflected light is split by a light splitting means 3, and one beam is photodetected by a photodetecting means 4 which has a two-dimensional sensitivity distribution. Then, the position on the photodetection surface is calculated by an image processing circuit 6 and an arithmetic means 7 and compared with a preset reference position to calculate the quantity of deviation, which is converted into the angle theta of rotation of the body 2 to be inspected and fed back to a controller 8. The position of the body 2 to be inspected in an X-axial direction perpendicular to a rotary shaft is corrected. Similarly, the quantity of deviation calculated by an arithmetic means 7 is fed back to a stage controller 10 and a photodetecting means 5 is moved on a stage 11 until the other beam is photodetected correctly, thereby correcting the X-axial position.
|
