| 摘要 |
PURPOSE:To control the emitted ion current from the ground potential by providing a level shifter between an extracting electrode and a control power supply. CONSTITUTION:A stainless steel chip mounted with a GaInSn alloy is used as an ion emitting section 1, and Zener diodes connected in series are used as a level shifter 7. When the voltage of an accelerating power supply 5 is set to 15KV and the voltage drop of the level shifter 7 is set to 8KV, if the output voltage of a control power supply 6 is changed by 0-2KV, the emitted ion current can be changed by 1-50muA. Accordingly, the control power supply 6 can be operated at the ground potential standard, no insulating transformer is required, the control power supply 6 with the narrow output voltage range of 0-2KV is sufficient, the device is made small-sized, and its cost can be reduced.
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