| 摘要 |
PURPOSE:To extend the life and avoid the erroneous emission by forming the surface layer portion of a cathode electrode out of a pair of electrodes with a metal cilicide and containing nitrogen in the discharge gas. CONSTITUTION:The surface layer portion of a cathode electrode 29 out of a pair of electrodes 29, 31 is formed with a metal cilicide (MSix) (M is metal, (x) is an integer), and nitrogen (N2) is contained in the discharge gas. Therefore, a metal cilicide with the low specific resistance constituting the surface layer portion of at least a cathode electrode 29 is spattered by the gas discharge, scattered in the gas space 21, then combined with N2 contained in the discharge gas, and generates a compound with the high specific resistance such as silicon nitride (SiNy) ((y) is an optional integer) and a nitride of metal silicide (MpSiqNr) ((p), (g), (r) are optional integers). Accordingly, a short circuit across electrodes can be suppressed, the nitrogen compound deposited between electrodes is transparent, thus the luminous brightness is not reduced, the life is extended, and the erroneous emission can be avoided. |
