PROCESS AND EQUIPMENT FOR THE AUTOMATIC ALIGNMENT OF AN OBJECT IN RESPECT OF A REFERENCE

摘要

The alignment system uses a pair of spaced analysis windows (15) for viewing crosses carried by the substrate. Each window uses a photodiode matrix divided into quadrants with a corresponding alignment cross image (IREX) provided at its centre. The misalignment of the generated cross and the semiconductor cross is determined from the detected overlap within each quadrant. The obtained misalignment values are used for connection of the semiconductor position by linear movement in coordinate directions and also rotation.