发明名称 |
SURFACE ROUGHENING METHOD |
摘要 |
A surface roughening method, preferably for a substrate of a solar cell, comprising coating the substrate with a photoresist material having light-shielding particles mixed therein, exposing and developing the photoresist coating and then etching the substrate with a suitable etchant. |
申请公布号 |
EP0180222(A3) |
申请公布日期 |
1988.10.12 |
申请号 |
EP19850113869 |
申请日期 |
1985.10.31 |
申请人 |
FUJI ELECTRIC CO., LTD.;FUJI ELECTRIC CORPORATE RESEARCH AND DEVELOPMENT LTD. |
发明人 |
UENO, MASAKAZU FUJI ELECTRIC CORPORATE RESEARCH;KATO, TOSHIAKI FUJI ELECTRIC CORPORATE RESEARCH |
分类号 |
H01L31/04;C03C15/00;H01L21/302;H01L21/308;H01L31/0236;H01L31/052;(IPC1-7):H01L21/308;H01L31/02;G03F7/00 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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