发明名称 WORK BUILT-IN DEVICE
摘要 PURPOSE:To enable a work to be surely built in, by fixing a piezoelectric vibrator, vibrating the work at the amplitude conformed to the initial locational tolerance of the work, to a holding means to hold the work detachably. CONSTITUTION:At the time of building in, first a work 12 being located on a position A is attracted by a suction chuck 11, holding it. Then, this suction chuck 11 is moved and positioned in the upper part of a built-in part 13. At this time, a piezoelectric vibrator 14 is driven and it is made to go down while vibrating the vacuum chuck 11, whereby even if the work 12 is not accorded with an opening part of the built-in part 13, it will accor with this opening part at a certain point of time, so that it is further made to go down in a state of being fitted in the opening of the built-in part 13, thus it is built in. By so doing, even if initial positioning accuracy of the work is not raised up so high, the work can be surely incorporated in the built-in part.
申请公布号 JPS63245335(A) 申请公布日期 1988.10.12
申请号 JP19870075431 申请日期 1987.03.27
申请人 MURATA MFG CO LTD 发明人 OKABE SAKIICHI;YOKOYAMA TAKAO;KAKEHI RYUSEKI;INOUE JIRO
分类号 H01L21/52;B23P19/02;H01L21/677;H01L21/68 主分类号 H01L21/52
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