发明名称 Vertically integrated photodetector-amplifier.
摘要 <p>Monolithically integrated optical detector-amplifiers are described in which the detector-amplifier structure has vertical integration, and the amplifier is made of recessed gate MISFETS. The structure is planar which permits very fine line photolithography.</p>
申请公布号 EP0286348(A2) 申请公布日期 1988.10.12
申请号 EP19880303000 申请日期 1988.04.05
申请人 AMERICAN TELEPHONE AND TELEGRAPH COMPANY 发明人 CHANG, ROBERT PANG HEND;CHENG, CHU-LIANG;TELL, BENJAMIN
分类号 H01L29/78;H01L27/14;H01L27/144;H01L31/10;H01L31/105 主分类号 H01L29/78
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