发明名称 Exposure mask for materials coated with a photosensitive layer.
摘要 Upper and lower exposure mask for double-sided, simultaneous and accurately fitting exposure of materials coated with a photosensitive layer, for example untreated conductor boards consisting in each case of a substrate material with photographic emulsions such as silver halide/gelatine or diazo layers, the substrate material consisting of chemically hardened glass.
申请公布号 EP0286018(A2) 申请公布日期 1988.10.12
申请号 EP19880105250 申请日期 1988.03.31
申请人 BASF AKTIENGESELLSCHAFT 发明人 ECKLE, GEORGE ALBRECHT;KLINSMANN, UWE, DR.
分类号 G03C1/76;G03F1/00;G03F1/54;G03F7/09;H01L21/027;H05K3/00 主分类号 G03C1/76
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