发明名称 ULTRAVIOLET RADIATOR
摘要 PURPOSE:To reduce a running cost by a method wherein a gas which is easily transmitted through quartz and which is of the same kind as a sealed gas of a quartz discharge tube is used after the gas is mixed with another purge gas inside a lamp housing accommodating the quartz discharge tube in such a way that its pressure is almost equal to a partial pressure of the sealed gas. CONSTITUTION:An ultraviolet light source 1 composed of a quartz light-emitting tube and a lamp housing 2 to house the light source are used. A gas of the same kind as a gas which is easily transmitted through quartz and which is sealed inside the quartz light-emitting tube is mixed with another purge gas inside the lamp housing 2 in such a way that its pressure is almost equal to a partial pressure of the gas during an operation of the lightemitting tube. By this setup, even when the gas which is easily transmitted through the quartz is sealed in the quartz light-emitting tube, it is possible to enhance a radiation effect by increasing a radiation output of ultraviolet rays and to reduce a running cost of an ultraviolet radiator system.
申请公布号 JPS63244612(A) 申请公布日期 1988.10.12
申请号 JP19870076053 申请日期 1987.03.31
申请人 HITACHI LTD 发明人 KAWASUMI KENICHI;INADA AKIISA
分类号 B01J19/12;C23C16/48;H01L21/205;H01L21/26;H01L21/263;H01L21/31 主分类号 B01J19/12
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