Crystal diameter controlling method.

摘要

Disclosed is a method of controlling the diameter of a single crystal produced by the Czochralski method. The diameter of a tapered portion (32B) of the single crystal (32) is controlled by controlling the temperature of a melt (16) in a crucible (12) and the rotational speed of the crucible. The control range of the rotational speed of the crucible is made narrower as the diameter of the tapered portion approaches closer to that of a body portion (32C), and the rotational speed is made constant while the body portion is grown.