| 摘要 |
PURPOSE:To control processes efficiently by synchronizing and moving a carrier line and a movable receiving case by instructions from a computer and controlling the flow of wafers. CONSTITUTION:The wafer to which manufacturing treatment 11 is completed is placed on the carrier line and forwarded to the receiving case 2, placed at the position (a) of a receiving plate 21, and succeeding wafers are placed at positions (b)-(e) in succession. The wafer which must be treated by a device 12 is selected from the wafers at positions (a)-(e) by instructions from an information processor, the receiving case 2 is lifted or dropped, and the selected wafer is placed on the synchronizing carrier line without hindrance. The selection reference of the wafers is determined by the priority of the wafer treated by the device 12, the treating capacity of the device 12, etc. According to the constitution, the conveyor through which the flow of the wafers can be controlled is realized, the efficiency of production control is improved, and ICs of few mistakes can be manufactured. |
