| 摘要 |
PURPOSE:To make the control, regulation, and checking of the flow easier by furnishing a flow passage for the high pressure gas passing from a high pressure part to a low pressure part, and opening and closing the flow passage by an opening and closing device driven synchronously to a frequency generating device. CONSTITUTION:When an AC voltage is applied, a vibrator 31 to which a valve 32 is linked moves forward and rearward along the winding direction of an electromagnetic coil synchronously to the frequency of the AC voltage. As a result, the valve 32 is opened and closed to an introduction port 37 synchronously to the movement of the vibrator 31. The high pressure gas is introduced from an introduction passage 40, passing through a linking passage 34 which is restricted by a needle valve 30, and injected from the introduction port 37 which is opened and closed intermittently by the valve 32. The injection amount is determined by the frequency and the voltage of the voltage applied to the vibrator 31.
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