| 摘要 |
<p>PURPOSE:To realize mass-production and cost reduction by forming a substrate of a material which provides heat insulation. CONSTITUTION:An alumina thin film 6 is deposited on the glass substrate 5 by utilizing thin-film formation technique such as a vacuum vapor-depositing method. Then a metallic thin film of platinum, etc., is deposited similarly on the thin film 6 by the vacuum vapor-depositing method, etc., and then patterned by etching technique, and a resistor 7a for heat generation, a heat generating resistor temperature monitor 7b, and two couples of temperature measuring resistors 8a and 8b, and 9a and 9b are arranged at proper distances. Then the substrate 5 is cut so that the resistors 7a and monitor 7b, and resistors 8a and 8b, and 9a and 9b are paired, thereby obtaining individual sensor elements. Then the obtained sensor elements are adhered to a base and the resistors 7a and monitor 7b, and resistors 8a and 8b, and 9a and 9b are connected by lead wires to form a flow sensor. Thus, the mass-production and cost reduction are attained.</p> |
