| 摘要 |
PURPOSE:To make it possible to output also a surface state information easily while measuring a distance to an object to be measured, by processing a signal representing the signal level of an electric signal and a signal representing the quantity of light of a light source so as to deliver a surface state output representing the state of the surface of the object. CONSTITUTION:When a measuring head 1 is controlled with the relative distance to an object 3 to be measured and the attitude maintained to be constant, the quantity of received light is fixed substantially and the output of an arithmetic circuit 20, i.e. the signal level 22 of a voltage signal is maintained also to be constant. The quantity of light is detected by a light quantity detector 31, and the quantity of light 32 of a light source 2 is subjected, together with the signal level 22 of the voltage signal from the arithmetic circuit 20, to the division of the latter/the former by a division circuit in a signal processing circuit 33. Furthermore an output thereof is differentiated to obtain a surface state output, and the output delayed by a delay circuit and the output left not to be delayed are compared with each other to further obtain a surface state output. The output thus obtained is integrated and thereby a surface state output 34 is obtained.
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