| 摘要 |
PURPOSE:To efficiently produce a thin film region in which yield and with a wide visual field by providing a means for monitoring the sample region of on which an ion beam is projected. CONSTITUTION:The ion beam of argon, etc., is emitted from the ion source 2 placed in a vacuum vessel 1, and converged by an ion beam converging device 3 to a diameter of about 1mum. A sample holder 5 carrying the sample 6 is moved to the region irradiated with the ion beam. Whether the desired region of the sample 6 is irradiated with the ion beam or not is monitored by a monitoring means 7, and the movement of the sample holder 5 is controlled. By the mechanism of this ion syringe device, a thin film region (visible field region) having about 1mum thickness can be efficiently formed on the desired region of the sample with a wide visual field, and the thin film region can be used as the sample for a transmission type electron microscope.
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