APPARATUS FOR PRODUCING SEMICONDUCTOR

摘要

PURPOSE:To extend the life of a quartz type detector and to permit exact measurement by separating a quartz type detector chamber formed of vacuum bellows and a crystal growth chamber having molecular ray sources and connecting the two chambers by a gate valve. CONSTITUTION:The quartz type detector chamber 9 which has the quartz type detector 1 and is formed of the freely expandable and contractable vacuum bellows 10 and the crystal growth chamber 6 which has the molecular ray sources 3 are separated. The two chambers are connected by the gate valve 8 and evacuation devices are provided to the respective chambers. The gate valve 8 connecting the detector chamber 9 and the crystal growth chamber 6 is opened and the vacuum bellows forming the detector chamber 9 is pushed and contracted to move the quartz head 2 of the detector 1 to the chamber 6 so that the head 2 is positioned at the center of the evaporating particles from the plural molecular ray sources 3 of the chamber 6 at the time of measuring the quantity of the evaporating molecules from the plural sources 3. The bellows 10 of the chamber 9 is extended to house the head 2 into the chamber 9 and the valve 8 is closed after the measurement of the quantity of the evaporating molecules ends.