| 摘要 |
PURPOSE:To obtain a thin film magnetic head which has high wear resistance and good magnetic characteristics by subjecting main bodies of a nonmagnetic material to film formation by sputtering, vapor deposition, etc., of a nonmagnetic high melting high hardness material such as ceramics, then impregnating and packing low melting glass thereto at the time of said formation. CONSTITUTION:W-shaped grooves 6 for controlling track width are worked on nonmagnetic substrates 1a, 1b. Amorphous Co-Nb-Zr magnetic films and insulating SiO2 films having high saturation magnetic flux densities are alternately laminated by sputtering thereon to form magnetic films 2 having 4-layered structure. Forsterite films 41 are formed on the films 2 by an electron ray vapor deposition method and further, the low melting glass 42 of lead system is sputtered thereon. The glass is then heat-treated at this time so that the glass flows into the crack parts 42 of the films 41. The front faces of the substrates formed with the nonmagnetic packed films 4 are lapped to form a gap surface. Cr 31 and low melting glass 32 of lead system as the gap spacer are formed by sputtering. These substrates 1a, 1b are combined and lead glass bars are inserted into the front end parts of the grooves and are heated to adhere said parts. The substrate is cut by a dicer for each chip, by which the heads are formed.
|
