| 摘要 |
PURPOSE:To effectively generate a short wavelength light that can preliminarily ionize a discharge space efficiently by forming pin electrodes for preliminarily ionizing a discharge space in a shape by which an equal electric field is obtainable to raise a discharge starting voltage of the electrode. CONSTITUTION:A pair of holding plates 3 are disposed oppositely in space in an elevational direction in a laser tube 1. An anode 3 is mounted on a holding plate 2 above it, and a cathode 4 is mounted on the plate 2 under it. In this case, the ends of upper and lower electrodes 5, 6 are formed in spherical sections 11, which are formed in sufficiently larger diameter than the shaft 12 of the electrodes 5, 6. The ends of the electrodes 5, 6 are formed in a shape capable of obtaining an equal electric field in case of discharging. Thus, a discharge starting voltage of the electrodes 5, 6 is enhanced, and a short wavelength light capable of efficiently preliminarily ionizing the discharge space is efficiently generated. |
