| 摘要 |
PURPOSE:To smoothly drive a slide at a high speed by exerting the same amount of magnetic force simultaneously, on its slide sections supported in a non- contact manner. CONSTITUTION:A direct-acting type magnetic-bearing motor is composed of a driving gear 28 connected to a load and driving the load, and a controller for controlling this driving and its bearing. The driving gear 28 is composed of a guide member 28A for a stationary guide section mounted on a stationary member 32 and set extensively along the specified slide direction A, and a slide section 28B guided in non-contact with the guide memher 28A. The slide section 28B is almost rectangularparallelopiped-formed, and is provided with a slide main-unit 34 having an almost-'T'-formed space B in the internal section, an electromagnet group in charge of a magnetic bearing, a slide driving electromagnet group, and an X, Y-directional distance sensor. As a result, the slide section 28B slides in a state that it is supported in non-contact with the stationary guide section 28A.
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