| 摘要 |
PURPOSE:To correct the positional deviation of a laser beam due to the deflection of a beam by calculating the deviation at the command position of the laser beam commanded from the stored deviation data to control the position at the command position whose command position is corrected based on said deviation. CONSTITUTION:The command positional data of the laser beam are read out from a RAM with a step 200 and an area A surrounded by four points (a), (b), (c) and (d) in which the command position P(X and Y) exist is calculated with a next step 202. Next, the deviations ( Spx and Spy) at the command position P(X and Y) of the laser beam are calculated interpolatively using the deviations at respective points (a)-(d) with a step 204. By this method, when the deviation at the point P is calculated, the command position of the laser beam is corrected with a step 206 and the laser beam is positioned at the corrected position with a step 208. Then, it is decided whether or not the position control has been finished with respect to the whole command positions with a step 210 and in case it has not been finished, it is returned to the step 200 and the next command position is read out there. |
