发明名称 ULTRASONIC WELDING METHOD USING COUPLING OSCILLATION AND ITS EQUIPMENT
摘要 PURPOSE:To perform the joining with a high degree of safety by allowing a welding chip part to carry out the coupling oscillation and controlling the oscillation amplitude and oscillation phase of each oscillation component to control a shape of an oscillation locus of a welding chip. CONSTITUTION:A bending oscillating rod 21 with the different oscillation degree according to the oscillating direction is used and driven by plural vertical oscillating system and bending oscillating system or torsional oscillating system 22 and 23 arranged at right angles or at prescribed angles. The driving position of the composite bending oscillating rod 21 in the case of being driven by the vertical oscillating system and the bending oscillating system is a node part of the bending oscillation in the different oscillating direction and the oscillating rod 21 is driven at the positions 21b and 21c close to a loop part of the oscillation in the driving direction and moreover, driven at the node part in the different oscillating and driving oscillating direction with the bending oscillating system, by which the stable coupling oscillation is obtained. As to the welding method, samples 24 and 25 to be welded are overlapped each other and impressed with the static pressure 20 by the welding chip 21a part and the oscillation amplitude and oscillation phase of the plural oscillating systems are controlled to control the oscillation locus of the welding chip and the joining is performed.
申请公布号 JPS63242479(A) 申请公布日期 1988.10.07
申请号 JP19870076139 申请日期 1987.03.31
申请人 TSUJINO JIROMARU 发明人 TSUJINO JIROMARU
分类号 B23K20/10;H01L21/60;H01L21/607 主分类号 B23K20/10
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