| 摘要 |
PURPOSE:To improve the heat treatment quality of a semiconductor heat treat ment furnace by using the mean value after the convergence of temperature in the furnace as the heater temperature at the time of creating profile data, thereby creating accurate profile data. CONSTITUTION:In an auto-profiling system wherein in order to perform the PID control of a heater 3 disposed on the external furnace wall of a furnace 1 thereby to control the temperature in the furnace to a predetermined tempera ture, the profile data is automatically calculated using a profile thermocouple 5 for detecting the temperature in the furnace and a heater thermocouple 4 for detecting the temperature of a heater 3, with the heater 3 being controlled through a heater driver 2 so that the heater temperature becomes a fixed value, a convergence determining circuit 12 determines that the temperature in the furnace has converged, and based on this convergence determination the mean value of the heater temperature is calculated in an averaging circuit 13. Based on the calculated mean value and the convergence temperature of the tempera ture in the furnace, a profile data calculating circuit 11 creates the profile data.
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