| 摘要 |
PURPOSE:To enable evolution of highly concentrated ozone-containing gas, by setting electrodes generating both creeping discharge and silent discharge. CONSTITUTION:A first electrode 20, second electrodes 40 opposing the first electrode while laying an alumina ceramic layer 30 between them and a third electrode 50 opposing the second electrodes are set in a hollow outer frame 10 of approximately rectangular parallelepiped shape. Oxygen or air is made to flow from an inlet 11 at one face of the outer frame 10, simultaneously high-frequency voltage of given value is impressed to the electrodes 40 to generate creeping discharge between the electrodes 40. Then, when high-frequency voltage of given value is impressed to the electrode 50, since a gas in the vicinity of the electrodes 40 is ionized, immediately silent discharge is generated between the electrodes 50 and 20. Oxygen or air flowing in the vicinity of the electrodes 40 of the introduced oxygen or air is converted into ozone by creeping discharge and flowing at part separated from the electrodes 40 into ozone by silent discharge. Consequently, highly concentrated ozone-containing gas is obtained.
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