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发明名称
Verfahren und Anordnung zur elektronischen Aufdampfung von Substanzen auf isolierende Unterlagen
摘要
申请公布号
AT252682(B)
申请公布日期
1967.03.10
申请号
AT19650001897
申请日期
1965.03.04
申请人
BALZERS PATENT- UND LIZENZ-ANSTALT
发明人
分类号
C23C14/30;H01J37/305
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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