| 摘要 |
PURPOSE:To dispense with a correction plate and to stabilize operation, by using a beam splitter composed of a parallel plane plate having beam semipermeable surfaces on both surfaces thereof and one set of inverse reflectors. CONSTITUTION:An interferometer is constituted of a beam splitter 19 composed of a parallel plane plate having beam semipermeable surfaces on both surfaces thereof and two fixed and movable inverse reflectors 23, 24 arranged so as to be respectively separated by a predetermined distance from both surfaces of the splitter 19. By this constitution, incident beam is divided by the single surface of the beam splitter 19 and the divided incident beams are respectively reflected by the aforementioned inverse reflectors 23, 24 and allowed to interfere with each other by the surface dividing the aforementioned incident beam and the separate surface and, therefore, a correction plate required heretofore can be eliminated from the interferometer.
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