FORMATION OF SUPERCONDUCTIVE CIRCUIT

摘要

PURPOSE:To form a fine superconductive circuit by projecting an ion beam according to circuit patterns to thin film-shaped oxide ceramics formed on a substrate, thereby forming a superconductive phase in the irradiated part. CONSTITUTION:The thin film 1 consisting of the oxide ceramics is formed on the substrate 2 by heating and evaporating elements such as group Ib element, group IIa element or group IIIa element or the oxide or salt thereof in an oxygen atmosphere and subjecting the vapor thereof further to ionization, etc. The above-mentioned oxide ceramics preferably contains at least copper and oxygen or silver and oxygen as the constituting elements thereof. The thin film-shaped oxide ceramics 1 on the substrate 2 is then heated to a prescribed temp. by a substrate heater 6 in a vacuum chamber 4. The ion beam 5 of the group IIa element or IIIa element is projected according to the circuit patterns to this oxide ceramics 1. The implanted ions are thereby combined with the oxide ceramics 1, by which the superconductive phase of the crystal structure exhibiting superconductivity is formed linearly to the irradiated part.