| 摘要 |
PURPOSE:To form the thin film of single crystal on a substrate having large area by projecting energy beams on a built-up amorphous or polycrystalline thin film which is built-up on the substrate in a fine-spot shape and converting it into fine particles of single crystal and two-dimensionally growing them. CONSTITUTION:Fine-spot deposit consisting of amorphous or polycrystalline material is formed on a nucleus nonformation face 1. This deposit is subjected to single crystallization by projecting energy beams thereon and single nucleus is formed. Then single crystal 5 is grown by performing crystal formation treatment thereto.
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