发明名称 X-RAY GENERATOR AND X-RAY EXPOSER APPLIED THEREWITH
摘要 PURPOSE:To make linear, high output pseudo-parallelized X-rays securable by opening a part of the side of a small tubular space and making X-ray emitted from there at the time of producing plasma in the small tubular space by creeping discharge along a wall to form the small tubular space, and generating these X-rays. CONSTITUTION:When a condenser Cd is charged and sufficiently large voltage is impressed on glass 8, a dielectric sheet 9 covering this glass 8 and material 10 are evaporated by creeping discharge of a capillary 2 whereby plasma 5 is produced. At this time, if an electrode beam is irradiated to the plasma 5 from a cathode 6, temperature in the plasma 5 goes up, and plasma density becomes high. And, X-rays 7 in the wavelength area conformed to the material 10 is produced and emitted linearly from a part which is not covered with a dielectric at the side of the capillary 2. In this manner linear, high output pseudo-parallelized X-rays are securable.
申请公布号 JPS63239755(A) 申请公布日期 1988.10.05
申请号 JP19870071710 申请日期 1987.03.27
申请人 CANON INC 发明人 AMAMIYA MITSUAKI
分类号 H05G2/00;H01J35/22;H01L21/027;H01L21/30;H05G1/02 主分类号 H05G2/00
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