| 摘要 |
PURPOSE:To reduce a hysteresis due to temperature hysteresis substantially linearly at the temperature dependency of a resonance frequency and to improve the humidity resistance of a piezoelectric thin vibrator by forming an SiO2 or TiO2 film by high frequency sputtering, coating and drying organic metal compound solution containing mainly Pb, Zr, Ti on the obtained vibration plate, and then heat-treating it at a specific temperature in the atmosphere. CONSTITUTION:The material of a vibration plate 1 is of Fe-42Ni alloy or stainless steel, and its thickness is preferably 20-50mum. In order to prevent the plate 1 from oxidizing, an oxide of SiO2 and TiO2 is disposed on the surface. The thickness of the SiO2 or TiO2 film is preferably 0.1-3mum. A thin piezoelectric film on the surface of the plate 1 can be obtained by dipping the plate 1 having the SiO2 or TiO2 film on the surface in organic metal compound solution containing Pb, Zr, Ti or the like, lifting it at approx. 5-20cm per one minute into the atmosphere, then drying it at room temperature, and further heat-treating it at 400-1000 deg.C. |
