| 摘要 |
PURPOSE:To obtain a large-area and good-quality thin diamond film by introducing a microwave into a reaction chamber, and growing diamond in a vapor phase on a substrate while applying a magnetic field of specified intensity by an electromagnet. CONSTITUTION:The diamond film producing device has the following constitution. Namely, the reaction chamber 1, the means (5, 8, etc.) for introducing a raw gas into the reaction chamber 1 from the outside, a means 6 for holding the substrate in the reaction chamber 1, a means 7 for heating the substrate, microwave supply means 3 and 4 for introducing a microwave into the reaction chamber 1, and a means 2 for forming a magnetic field having at least the 2 times intensity for the intensity fulfilling the ECR condition at the time of forming the magnetic field in the reaction chamber 1 are provided. The reaction chamber 1 consisting of a cavity resonator is preferably used.
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