| 摘要 |
PURPOSE:To make it possible to obtain the reaction which is stable for a long period by a method wherein a ferromagnetic field, with which electron cyclotron resonance (ECR) will be generated in the vicinity of the substrate arranged on the position separated from a microwave introducing part, is generated. CONSTITUTION:A substrate 11 is arranged on the position separated from a microwave introducing part 20, and plasma is generated in the vicinity only of the substrate by forming a ferromagnetic field which produces electron cyclotron resonance in the vicinity of the substrate 11. It is desirable to use the microwave antenna such as a horn antenna, a slot antenna, a helical antenna and the like in order to effectively propagate microwaves to the ECR field located in the vicinity of the substrate. As a means to generate a magnetic field, a permanent magnet can be used besides an electromagnet. As a result, the adhesion of a film and powder to a microwave introducing window 20 can be reduced, and the electric discharge which is stable for a long period can be obtained.
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