| 摘要 |
PURPOSE:To prevent generation of dust from an adhesive seal by forming an inside circumferential surface of a non-dust generating material. CONSTITUTION:The adhesive seal 3 is formed of a double-coated adhesive agent 7 and a base material 6. The outside circumferential surface 6b of the base material 6 is formed of a foamed material to have enhanced press- adhesiveness. The inside circumferential surface 6a is formed of the non-dust generating material such as non-foamed plastic and aluminum, by which the generation of the dust to a substrate 4 is prevented. The adhesive seal suitable for adhesion of a frame 2 stuck with a pellicle 1 to the substrate 4 is thus obtd. |
