CAPPED TWO-LAYER RESIST PROCESS,申请号EP19870102191-传众专利搜索

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发明名称	CAPPED TWO-LAYER RESIST PROCESS
摘要
申请公布号	EP0244572(A3)	申请公布日期	1988.10.05
申请号	EP19870102191	申请日期	1987.02.17
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	LYONS, CHRISTOPHER FRANCIS
分类号	G03F7/26;G03F7/095;G03F7/38;G03F7/40;(IPC1-7):G03F7/02	主分类号	G03F7/26
代理机构		代理人
主权项
地址

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