| 摘要 |
PURPOSE:To suppress the absorption of laser light with the laser medium gas of an extension and to stabilize a laser output by disposing external communication means for supplying and exhausting the gas to the extensions of both ends of a discharge tube. CONSTITUTION:A first inlet tube 8a is attached to a duct 2a connected between extension ducts 2 and 2 provided with oblique reflecting mirrors M2, M3. Second and third inlet tubes 8b, 8c are attached to the ducts 2, 2 of remote side from a communication duct 5, and a fourth inlet tube 8d is attached to the duct 2 provided with a reflecting mirror M1 of near side. Accordingly, each time laser medium gas is replaced, the gas of the duct 2 is combined with laser medium gas circulating stream. Thus, the rise of gas temperature due to the absorption of the laser light in the duct 2 can be suppressed to obtain a stable laser output. |
