Silicon carbide diffusion furnace components with an impervious coating thereon.

摘要

A diffusion furnace component system is disclosed which includes a liner, process tube, paddle and boat. These various elements are made up of a matrix of sintered silicon carbide which has been infiltrated with 5 to 30% by weight of silicon metal and finally coated with an impervious film or layer of a high purity refractory material such as e.g. silicon carbide.