| 摘要 |
PURPOSE:To obtain an interference device utilizing a microscope and capable of measuring flatness with high accuracy, by constituting said unit of the reference mirror placed at the position equivalent to the distance from a beam splitter to an object to be measured and a fine adjustment mechanism for adjusting the position and angle of said mirror. CONSTITUTION:A beam splitter 2 placed between the objective lens 5 of a microscope and an object 6 to be measured and distributing measuring beam in two directions and the reference mirror 3 placed at the position equivalent to the distance from the beam splitter 2 to the object 6 to be measured are arranged in the main body 1 mounted to the mirror cylinder 50 of said objective lens 5. The mounting of the main body 1 on the microscope is performed by covering the mirror cylinder 50 with the cylindrical body 10 of the main body 1 to tighten a mount screw 15 and the interval between the lens 5 and the object to be measured is determined by the regulation mechanism in the microscope. Subsequently, the position and angle of the reference mirror 3 are adjusted by a fine adjustment mechanism 4 so that the number of interference fringes generated when the beam from the object 6 and the beam from the reference mirror 3 are synthesized in the splitter 2 are reduced. Therefore, flatness can be measured with high accuracy by utilizing interference.
|
