X-RAY MASK AND MANUFACTURE THEREOF

摘要

PURPOSE:To improve exceedingly the mask pattern accuracy by causing a multilayered film reflecting mirror where thin films mainly consisting of heavy and light elements having the prescribed thicknesses are alternately laminated to be a reflecting part and by making a film where X-ray reflectance is lowered by changing the property of a multilayered film an absorption part. CONSTITUTION:A part 14 reflecting X-rays of a X-ray mask is a multilayered film reflecting mirror 14 where heavy and light element thin films having the prescribed thicknesses are alternately laminated and a part 13 which does not reflect the X-rays is a deteriorated film where an interface between two sorts of multilayers and a multilayered structure are so indistinct that the interference effect loses its function. Further, since the multilayered film 10 has a structure where tens of layers have been deposited, a narrow multilayered film pattern 10a is stably in existence on a substrate 1a. Thus the pattern accuracy and stability of the X-ray mask can be improved.