| 摘要 |
PURPOSE:To allow the clamps of two arms and the release operation thereof to certainly respond to the operation cycle of a piezoelectric actuator, by moving the other part of the arm main body without sliding along guide plates by levitating the same between said guide plates when the clamps of two arms are operated. CONSTITUTION:When positive voltage is applied to the piezoelectric actuator (KA) 16 for clamping arms 11, 13, the other part of the arm body 10 becomes a levitated state. When positive voltage is applied to the piezoelectric actuator (IA) 15 for moving the arm 11 to extend the same and negative voltage is applied to the actuator (KA) 15 of the arm 13 to contract the same, the central part 10A of the arm body 10 displaces in an X-axis direction. At this moving time, the moving part of the arm body 10 moves without sliding. Next, positive voltage is applied to KA of arms 12, 14 and a clamp element is brought into engagement with guide plates 17, 18 and the voltage applied to KA 16 of the arms 12, 14 is removed to release the clamping of both arms. Then, positive voltage is applied to KA 16 of the arms 11, 13 to clamp both arms. By the series of these operations, a table part 10B slightly displaces in the positive direction of the X-axis and, therefore, this operation is repeated to make the limitless movement in the same direction possible. |
