In-line determination of presence of liquid phase moisture in sealed IC packages

摘要

Liquid-phase moisture is detected in sealed integrated circuit packages by measuring the conductance and capacitance of the integrated circuit at a temperature which is above temperatures which allow moisture to condense; and remeasuring the conductance and capacitance of the integrated circuit at a temperature which allows any moisture present to condense on the integrated circuit. The conductance of the integrated circuit is expected to rise sharply with the condensation of water on its surface.