Zero bird-beak oxide isolation scheme for integrated circuits,申请号US19870057458-传众专利搜索

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发明名称	Zero bird-beak oxide isolation scheme for integrated circuits
摘要
申请公布号	US4775644(A)	申请公布日期	1988.10.04
申请号	US19870057458	申请日期	1987.06.03
申请人	LSI LOGIC CORPORATION	发明人	SZETO, ROGER T.
分类号	H01L21/76;H01L21/316;H01L21/32;H01L21/762;(IPC1-7):H01L21/467;H01L21/473	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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