| 摘要 |
PURPOSE:To make it possible to make an array of elements on a wafer coincide with the direction of stage movement, by providing means in which an array of light spots or light lines are projected on the wafer in accordance with the direction of probe or stage plane movement and rotating the stage so as to make the array of light spots or light lines coincide with an array of elements on the wafer. CONSTITUTION:When elements 3 formed on a wafer 2 are observed by a magnifier 1, an array of elements can be watched. On the other hand, an array of very small light spots are formed on the surface of the elements on which light is projected from a light source 4. Light lines are also available in stead of the array of light spots. This array of light spots is made to correspond with the direction of stage movement, that is, the position of a probe, and this position is adjusted by slightly rotating the wafer so that the array of light spots is made to coincide with the array of elements. These light spots form very small images on the surfaces of the elements. Hence, the array of elements and the light spots can be simultaneously observed clearly by a magnifier and so the adjustment can be accurately performed.
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