| 摘要 |
PURPOSE:To hold a probe and a sample at a constant distance by utilizing the elastic deformation of a rotatable base which abuts on the tip of a knife edge. CONSTITUTION:The sample base 25 is turned to a position shown by an alternate long and short dash line to replace a sample and perform a surface treatment. Then a worm 18 is rotated to rotate a wheel 21 and the base 25 as shown by arrows, and the tip part of a rigid body member 23 is made to abut on the upper end of the knife edge 13. When the worm 18 is further rotated in this state, an elastic member 24 bends and the base 25 operates as a contraction lever. Thus, the sample 26 is put close to the probe 15 to such a distance that a desired tunnel current flows, and the driving of a rough moving mechanism is stopped. Then operation is performed by a fine moving mechanism 14 and the surface of the sample 26 is inspected. Consequently, the sample can be replaced at a sufficient distance from the probe, and the sample base is securely fixed to hold the probe and sample at a constant distance.
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